TY  - BOOK
ED  - NATO Advanced Research Workshop on Defects in High-K Dielectric Nano-electronic Semiconductor Devices (2005 : Saint Petersburg, Russia) 
TI  - Defects in high-k gate dielectric stacks: nano-electronic semiconductor devices
T2  - Series II, Mathematics, physics and chemistry
SN  - 1402043651
AV  - ML2006 .D44 2006
PY  - 2006///
CY  - Dordrecht
PB  - Springer, c2006
KW  - Gate array circuits--Congresses.
KW  - Dielectrics--Congresses.
KW  - Semiconductors--Defects--Congresses.
N1  - "Proceedings of the NATO Advanced Research Workshop on Defects in Advanced High-k Dielectric Nano-electronic Semiconductor Devices, held July 11-14, 2005, in St. Petersburg, Russia."--Colophon.; Includes bibliographical references and indexes
ER  -