TY  - BOOK
TI  - Nanoscaled semiconductor-on-insulator structures and devices
T2  - NATO science for peace and security series
SN  - 9781402063794
AV  - TK7871.85 .N386 2007
PY  - 2007///
CY  - Dordrecht
PB  - Springer
KW  - Yarıiletkenler--Kongreler
KW  - Nanobilim--Kongreler
KW  - Semiconductors--Congresses
KW  - Nanotechnology--Congresses
ER  -