TY  - BOOK
TI  - Micro process engineering: a comprehensive handbook 
SN  - 9783527315505
AV  - TS183 .M53 2009
PY  - 2009///
CY  - Weinheim
PB  - Wiley-VCH
KW  - Production engineering.
KW  - Microtechnology
N1  - Kaynakça ve dizin var; volume 1 fundamentals, operations and catalysts
ER  -