Defects in high-k gate dielectric stacks : nano-electronic semiconductor devices/
Defects in high-k gate dielectric stacks : nano-electronic semiconductor devices/
edited by Evgeni Gusev..
- x, 492 p. : ill. ; 25 cm.
- Series II, Mathematics, physics and chemistry ; v. 220 NATO science series. .
- NATO science series. Series II, Mathematics, physics and chemistry ; v. 220 .
"Proceedings of the NATO Advanced Research Workshop on Defects in Advanced High-k Dielectric Nano-electronic Semiconductor Devices, held July 11-14, 2005, in St. Petersburg, Russia."--Colophon. Includes bibliographical references and indexes.
1402043651 1402043678 9781402043659 14
Gate array circuits--Congresses.
Dielectrics--Congresses.
Semiconductors--Defects--Congresses.
ML2006 / .D44 2006
"Proceedings of the NATO Advanced Research Workshop on Defects in Advanced High-k Dielectric Nano-electronic Semiconductor Devices, held July 11-14, 2005, in St. Petersburg, Russia."--Colophon. Includes bibliographical references and indexes.
1402043651 1402043678 9781402043659 14
Gate array circuits--Congresses.
Dielectrics--Congresses.
Semiconductors--Defects--Congresses.
ML2006 / .D44 2006